Ultrahigh Accurate 3-D Profilometer
Japanese / English
『Option』
UA3P options for measuring a wide range of shapes
Hardware
Mechanics options |
Details |
|
---|---|---|
1 |
Auto Tilt Stage (2 Axis, 3 Axis) |
Mechanism that automatically corrects the tilt of a measuring object based on its measured data. |
2 |
Wafer Chuck & Stage |
Adding an air chucking stage and recognition camera for wafer lens measurement. |
3 |
Decenter and Tilt measuring Jig (various types) |
Jig used for decenter and tilt measurement (used in combination with option software [9]) |
Stylus for top-surface measurement
![](/content/dam/panasonic/global-en/business/ua3p/option/option_stylus_01.jpg)
(PED-16100112)
![](/content/dam/panasonic/global-en/business/ua3p/option/option_stylus_02.jpg)
(PED-1610M079)
![](/content/dam/panasonic/global-en/business/ua3p/option/option_stylus_03.jpg)
(PED-16100116)
![](/content/dam/panasonic/global-en/business/ua3p/option/option_stylus_04.jpg)
(PED-1610M106)
![](/content/dam/panasonic/global-en/business/ua3p/option/option_stylus_05.jpg)
(PED-1610M052)
![](/content/dam/panasonic/global-en/business/ua3p/option/option_stylus_06.jpg)
(PED-1610M077)
Stylus for side-surface measurement
![](/content/dam/panasonic/global-en/business/ua3p/option/option_stylus_07_en.jpg)
(PED-1630M020)
![](/content/dam/panasonic/global-en/business/ua3p/option/option_stylus_08.jpg)
(PED-1630M021)
![](/content/dam/panasonic/global-en/business/ua3p/option/option_stylus_09.jpg)
(PED-1630M022)
![](/content/dam/panasonic/global-en/business/ua3p/option/option_stylus_10.jpg)
(PED-1630M035)
![](/content/dam/panasonic/global-en/business/ua3p/option/option_stylus_11_en.jpg)
(PED-1630M024)
![](/content/dam/panasonic/global-en/business/ua3p/option/option_stylus_12_en.jpg)
(PED-1630M025)
Decenter and Tilt measurement jig
Decenter/Tilt measurement between lens faces
The lens is fixed on a jig provided with three reference balls for combination. Any decentering between the lens faces is evaluated by measuring both faces of the lens.
![](/content/dam/panasonic/global-en/business/ua3p/option/option_aspherical_face_lens.jpg)
![](/content/dam/panasonic/global-en/business/ua3p/option/option_evaluation_of_decenter.jpg)
![](/content/dam/panasonic/global-en/business/ua3p/option/option_decenter_jig.jpg)
Observation camera
Applicable model:All models
A measuring point is magnified for display to enable easy positioning.
![Observation magnification 40x-50x (for a 17" monitor)](/content/dam/panasonic/global-en/business/ua3p/option/option_observation_camera.jpg)
Wafer level lens (WLL)
Applicable model:UA3P-500H/650H/700H
![Wafer level lens (WLL)](/content/dam/panasonic/global-en/business/ua3p/option/option_wafer_lens.jpg)
* Precautions
*1 Note that the ruby stylus is at risk of breaking due to its large coefficient of friction while measuring aluminum lenses or surface-coated lenses.
*2 The stylus for side-surface measurement (Φ30 µm - Φ300 µm) may require an observation camera for measurement.
◆ In addition to the contents described, we prepare a variety of stylus, such as different size and material. Please contact our sales for detail.
Software
Software Option |
Details |
|
---|---|---|
1 |
Circular scanning measurement function |
Adds circumferential scanning NC paths for measured objects with a hole in the center. |
2 |
Top Flat centering function |
Function that enables centering of a measuring object whose center is nearly flat. |
3 |
User-defined formula function |
Function to evaluated by user created formula. |
4 |
Aspherical coefficients fitting function |
Function to fit aspherical coefficients based on measured data. |
5 |
Diamond stylus correction function |
Function to correct stylus tip shape based on standard sphere measured data. |
6 |
Point cloud data design formula creation function |
Function to generate a spline curved formula based on points cloud converted from CAD data (provided by the customer) |
7 |
One million data points sampling, captureing 2000 points per second function |
Function to expand the number of measurement points and to increase the speed of capturing data points. |
8 |
Waveguide software (offline) |
Function to evaluate the dimensions of the shape of an object based on the measured data. |
9 |
Decenter and tilt evaluation software (offline) |
Function to evaluate decenter and tilt of lens front and back using the jig installed 3 sphere. |
10 |
Automatic Measurement Software |
Function to create measurtement procedure program and to execute procedures automatically. |
11 |
Wafer lens measurement software |
Function to measure and evaluate wafer lenses in combination with mechanical option [2] |
Circumferential scanning measurement software
The measured object is circumferentially scanned and measured.
- Hollow objects are also measureable.
- Up to 1200 concentric circles.
![The measured object is circumferentially scanned and measured.](/content/dam/panasonic/global-en/business/ua3p/option/option_circumferential_scanning.jpg)
User-defined software (free-form curved surfaces, etc.)
Other formulae are supported in addition to the lens design formula that is registered as a standard feature.
The use of the C language for creating the design formula and the calculation part of a partial differential equation allows all of ISO10110-12 to be covered.
![User-defined software (free-form curved surfaces, etc.)](/content/dam/panasonic/global-en/business/ua3p/option/option_user_defined.jpg)
Software for creating point group data design formula
A rectangular curved surface is created using the spline function with respect to given 3D point group data.
![](/content/dam/panasonic/global-en/business/ua3p/option/option_creating_point.jpg)
![](/content/dam/panasonic/global-en/business/ua3p/option/option_evaluation_of_varifocal_glasses.jpg)
Fitting software (rotation symmetry)
A previously unknown design formula of a measured object can be obtained from the measurement data.
![Fitting software (rotation symmetry)](/content/dam/panasonic/global-en/business/ua3p/option/option_fitting.jpg)
Auto-measurement
Applicable model:All models except for UA3P-400T
![Auto-measurement](/content/dam/panasonic/global-en/business/ua3p/option/option_auto_measurement.jpg)
Fully automated, including probe movement and focus ON/OFF
Supporting various errors
* The jig is prepared by the user